Open AccessFabrication of photonic band-gap crystals
Author(s) -
Chen Cheng,
Axel Scherer
Publication year - 1995
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.588051
Subject(s) - fabrication , photonic crystal , materials science , electron beam lithography , etching (microfabrication) , optoelectronics , lithography , dry etching , photonics , reactive ion etching , resist , yablonovite , semiconductor , silicon , optics , photonic integrated circuit , nanotechnology , medicine , alternative medicine , physics , pathology , layer (electronics)
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