Fabrication of noble-metal nanoconstrictions and observation of conductance fluctuations
Author(s) -
Elke Scheer,
H. v. Löhneysen,
H. Hein
Publication year - 1994
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.587494
Subject(s) - materials science , fabrication , silicon , microfabrication , bilayer , conductance , resist , electron beam lithography , evaporation , substrate (aquarium) , noble metal , electron beam physical vapor deposition , cathode ray , condensed matter physics , nanotechnology , metal , electron , thin film , optoelectronics , membrane , physics , chemistry , metallurgy , alternative medicine , oceanography , pathology , biochemistry , layer (electronics) , quantum mechanics , thermodynamics , medicine , geology
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