Open AccessScanning tunneling microscopy observation of local damages induced on graphite surface by ion implantation
Author(s) -
L. Porte,
Catherine Henry de Villeneuve,
M. Phaner
Publication year - 1991
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.585261
Subject(s) - hillock , scanning tunneling microscope , materials science , graphite , ion , ion implantation , collision cascade , nanotechnology , atomic physics , chemistry , thin film , composite material , physics , sputtering , organic chemistry
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