Synthesis of diamondlike carbon films with superlow friction and wear properties
Author(s) -
Ali Erdemir,
O.L. Eryılmaz,
G.R. Fenske
Publication year - 2000
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.582459
Subject(s) - sapphire , materials science , hydrogen , tribology , carbon fibers , diamond like carbon , carbon film , methane , chemical vapor deposition , argon , nitrogen , x ray photoelectron spectroscopy , composite material , thin film , plasma , friction coefficient , nanotechnology , chemical engineering , composite number , chemistry , laser , optics , physics , organic chemistry , engineering , quantum mechanics
In this study, the authors introduce a new diamondlike carbon (DLC) film providing a friction coefficient of 0.001 and wear rates of 10{sup {minus}9} to 10{sup {minus}10} mm{sup 3}/N.m in inert-gas environments (e.g., dry nitrogen and argon). The film was grown on steel and sapphire substrates in a plasma enhanced chemical vapor deposition system that uses using a hydrogen-rich plasma. Employing a combination of surface and structure analytical techniques, they explored the structural chemistry of the resultant DLC films and correlated these findings with the friction and wear mechanisms of the films. The results of tribological tests under a 10-N load (creating initial peak Hertz pressures of 1 and 2.2 GPa on steel and sapphire test pairs, respectively) and at 0.2 to 0.5 m/s sliding velocities indicated that a close correlation exists between the friction and wear coefficients of DLC films and the source gas chemistry. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios had the lowest fiction coefficients and the highest wear resistance. The lowest friction coefficient (0.001) was achieved with a film on sapphire substrates produced in a gas discharge plasma consisting of 25% methane and 75% hydrogen.
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