Open AccessPull-test adhesion measurements of diamondlike carbon films on silicon carbide, silicon nitride, aluminum oxide, and zirconium oxide
Author(s) -
R.A. Erck,
F.A. Nichols,
J. F. Dierks
Publication year - 1994
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.579359
Subject(s) - materials science , adhesion , enthalpy , oxide , layer (electronics) , nitride , carbide , carbon fibers , composite material , ceramic , silicon carbide , silicon , chemical engineering , composite number , metallurgy , thermodynamics , physics , engineering
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