Open AccessIn situ x-ray reflectivity measurements of thin film structural evolution
Author(s) -
Eric Chason,
Marc Chason
Publication year - 1994
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.579356
Subject(s) - intermetallic , materials science , annealing (glass) , thin film , x ray reflectivity , analytical chemistry (journal) , quartz , reflectivity , surface finish , layer (electronics) , optics , composite material , chemistry , nanotechnology , alloy , physics , chromatography
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