Open AccessUltraviolet photosulfidation of III–V compound semiconductors for electronic passivation
Author(s) -
Kevin R. Zavadil,
Carol I. H. Ashby,
A. J. Howard,
B. E. Hammons
Publication year - 1994
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.579282
Subject(s) - passivation , sulfur , ultraviolet , x ray photoelectron spectroscopy , sulfide , photoluminescence , oxide , materials science , semiconductor , chemical vapor deposition , photochemistry , inorganic chemistry , ultraviolet photoelectron spectroscopy , chemistry , analytical chemistry (journal) , optoelectronics , layer (electronics) , chemical engineering , nanotechnology , metallurgy , organic chemistry , engineering
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