Open AccessSmall ultrahigh vacuum compatible hyperthermal oxygen atom generator
Author(s) -
R. A. Outlaw,
Mark R. Davidson
Publication year - 1994
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.579266
Subject(s) - atomic physics , quadrupole mass analyzer , ion , electron , vacuum chamber , dissociation (chemistry) , ultra high vacuum , electron bombardment , energetic neutral atom , analytical chemistry (journal) , quadrupole , chemistry , flux (metallurgy) , materials science , physics , nanotechnology , nuclear physics , organic chemistry , chromatography , composite material
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