Open AccessCharacterization of defect geometries in multilayer optical coatings
Author(s) -
R. J. Tench,
Robert H. Chow,
Mark R. Kozlowski
Publication year - 1994
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.578948
Subject(s) - materials science , coating , characterization (materials science) , micrometer , optical microscope , microscopy , laser , scanning electron microscope , optics , composite material , nanotechnology , physics
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