Open AccessCharacterization of electron cyclotron resonance hydrogen plasmas
Author(s) -
C.A. Outten,
J. C. Barbour,
W.R. Wampler
Publication year - 1991
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.577350
Subject(s) - langmuir probe , electron cyclotron resonance , atomic physics , plasma , hydrogen , fluence , ion , plasma diagnostics , chemistry , analytical chemistry (journal) , physics , quantum mechanics , chromatography , organic chemistry
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