Open AccessRoom‐temperature pumping characteristics of a Zr–Al nonevaporable getter for individual gases
Author(s) -
C. Benvenuti,
F. Francia
Publication year - 1988
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.575541
Subject(s) - getter , adsorption , materials science , saturation (graph theory) , vacuum pump , nuclear engineering , analytical chemistry (journal) , chemistry , optoelectronics , engineering , chromatography , mathematics , organic chemistry , combinatorics
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