Open AccessPumping of hydrocarbons using nonevaporable getters
Author(s) -
L. C. Emerson,
R. J. Knize,
J.L. Cecchi
Publication year - 1987
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.574427
Subject(s) - getter , alkane , alkene , hydrocarbon , cycloalkane , materials science , thermodynamics , analytical chemistry (journal) , exponential function , chemistry , physics , mathematics , chromatography , organic chemistry , optoelectronics , mathematical analysis , catalysis
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