Open AccessLaser spectroscopy of sputtered atoms
Author(s) -
D. M. Gruen,
Michael J. Pellin,
C. E. Young,
W. F. Calaway
Publication year - 1986
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.573937
Subject(s) - sputtering , spectroscopy , ionization , laser , atomic physics , materials science , excited state , impurity , ion , x ray photoelectron spectroscopy , substrate (aquarium) , chemistry , thin film , optics , nuclear magnetic resonance , nanotechnology , physics , oceanography , organic chemistry , quantum mechanics , geology
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