Prediction of flow rates through an orifice at pressures corresponding to the transition between molecular and isentropic flow
Author(s) -
S. Demuth,
J.S. Watson
Publication year - 1986
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.573924
Subject(s) - knudsen number , flow (mathematics) , body orifice , isothermal flow , free molecular flow , isentropic process , residual , mechanics , compressibility , nonlinear system , flow coefficient , thermodynamics , work (physics) , mathematics , statistical physics , physics , open channel flow , engineering , mechanical engineering , algorithm , quantum mechanics
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