TiN high temperature diffusion barrier for copper‐gasketed stainless‐steel flanges
Author(s) -
E. L. Garwin,
E. W. Hoyt,
A. R. Nyaiesh
Publication year - 1986
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.573725
Subject(s) - gasket , flange , copper , materials science , diffusion barrier , tin , metallurgy , brazing , composite material , layer (electronics) , alloy
Klystrons manufactured at the Stanford Linear Accelerator Center are typically baked at temperatures of 550 °C for times as long as 200 h. During these long bakeouts the copper‐gasketed type 304 stainless steel flange joints (seven in all) diffusion bond so intimately that the flanges can be separated only with a jacking fixture, and copper is left on the sealing surfaces. Removal of this copper necessitates the use of abrasive materials, which can result in contamination of the klystron body and compromise its reuse. We report on the use of 50 and 150 A TiN thin films as a diffusion barrier between the Cu gasket and the stainless‐steel flange.
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