Open AccessVelocity and electronic state distributions of sputtered Fe atoms by laser-induced fluorescence spectroscopy
Author(s) -
C. E. Young,
W. F. Calaway,
Michael J. Pellin,
D. M. Gruen
Publication year - 1984
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.572430
Subject(s) - narrowband , laser , dye laser , spectroscopy , doppler effect , materials science , ion , atomic physics , spectral line , laser induced fluorescence , sputtering , argon , excimer laser , optics , chemistry , physics , thin film , organic chemistry , quantum mechanics , astronomy , nanotechnology
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