Open AccessEvaluation of Zr–V–Fe getter pump for UHV system
Author(s) -
H. C. Hseuh,
C. Lanni
Publication year - 1983
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.572090
Subject(s) - getter , torr , hydrogen , materials science , analytical chemistry (journal) , metallurgy , chemistry , thermodynamics , optoelectronics , physics , chromatography , organic chemistry
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