Open AccessLow-temperature chemical vapor deposition of tungsten from tungsten hexacarbonyl
Author(s) -
G.J. Vogt
Publication year - 1982
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.571599
Subject(s) - tungsten , chemical vapor deposition , coating , materials science , chemical engineering , deposition (geology) , hydrogen , carbon fibers , metallurgy , nanotechnology , chemistry , composite material , organic chemistry , composite number , paleontology , sediment , engineering , biology
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