Open AccessIon beam sputtering of fluoropolymers
Author(s) -
James S. Sovey
Publication year - 1979
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.570095
Subject(s) - sputtering , ion beam , materials science , etching (microfabrication) , ion , deposition (geology) , transmittance , ion beam deposition , sputter deposition , argon , thin film , analytical chemistry (journal) , optoelectronics , chemistry , optics , composite material , nanotechnology , layer (electronics) , paleontology , physics , organic chemistry , chromatography , sediment , biology
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