Open AccessShiva and Argus target diagnostics vacuum systems
Author(s) -
S.S. Glaros,
S. E. Mayo,
D. B. Campbell,
D. Holeman
Publication year - 1979
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.570055
Subject(s) - argus , ultra high vacuum , physics , computer science , nanotechnology , materials science , programming language
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