Open AccessHigh-resolution L M M Auger spectra from argon implanted in Be and Si
Author(s) -
D. M. Zehner,
H. H. Madden
Publication year - 1979
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.569997
Subject(s) - argon , auger electron spectroscopy , spectral line , atomic physics , full width at half maximum , auger , neon , auger effect , chemistry , emission spectrum , analytical chemistry (journal) , physics , optics , chromatography , astronomy , nuclear physics
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