Open AccessEffect of primary ion energy and surface chemistry on the secondary ion yields in low-energy SIMS experiments
Author(s) -
Ming L. Yu
Publication year - 1978
Publication title -
journal of vacuum science and technology
Language(s) - English
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.569668
Subject(s) - chemisorption , ion , chemistry , oxygen , secondary ion mass spectrometry , analytical chemistry (journal) , atomic physics , yield (engineering) , primary (astronomy) , inorganic chemistry , materials science , adsorption , physics , organic chemistry , chromatography , astronomy , metallurgy
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