Open AccessHigh-rate physical vapor deposition of refractory metals
Author(s) -
Max A. Sherman,
R.F. Bunshah,
H.A. Beale
Publication year - 1975
Publication title -
journal of vacuum science and technology
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2331-1754
pISSN - 0022-5355
DOI - 10.1116/1.568649
Subject(s) - materials science , refractory metals , grain size , niobium , vanadium , metallurgy , molybdenum , chemical vapor deposition , ductility (earth science) , void (composites) , impurity , yield (engineering) , composite material , creep , nanotechnology , chemistry , organic chemistry
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom