Open AccessUltrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films
Author(s) -
Andreas Furchner,
Christoph Kratz,
Wojciech Ogieglo,
Ingo Pinnau,
Jörg Rappich,
Karsten Hinrichs
Publication year - 2019
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5129800
Subject(s) - polarizer , mueller calculus , materials science , ellipsometry , anisotropy , optics , polarimetry , transmittance , achromatic lens , broadband , optoelectronics , thin film , infrared , scattering , birefringence , nanotechnology , physics
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