Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines | Zendy

Shirly Espinoza | Zendy; Fabio Samparisi | Zendy; Fabio Frassetto | Zendy; Steffen Richter | Zendy; Mateusz Rębarz | Zendy; O. Finke | Zendy; Martin Albrecht | Zendy; M. Jurkovič | Zendy; O. Hort | Zendy; Nicola Fabris | Zendy; Anna Zymaková | Zendy; DongDu Mai | Zendy; Roman Antipenkov | Zendy; J. Nejdl | Zendy; Luca Poletto | Zendy; Jakob Andreasson | Zendy

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Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Author(s) -

Shirly Espinoza,

Fabio Samparisi,

Fabio Frassetto,

Steffen Richter,

Mateusz Rębarz,

O. Finke,

Martin Albrecht,

M. Jurkovič,

O. Hort,

Nicola Fabris,

Anna Zymaková,

DongDu Mai,

Roman Antipenkov,

J. Nejdl,

Luca Poletto,

Jakob Andreasson

Publication year - 2020

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.5129674

Subject(s) - polarizer , materials science , optics , ellipsometry , vacuum ultraviolet , optoelectronics , laser , high harmonic generation , harmonics , beam (structure) , characterization (materials science) , physics , thin film , nanotechnology , birefringence , quantum mechanics , voltage

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