Selective growth of uniform single-layer graphene on Cu foil and fabrication of damage-free field effect transistor combining with direct transfer
Author(s) -
Seulgi Park,
Hyunjin Park,
Youngmoon Choi,
Ohyun Kim
Publication year - 2019
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5109737
Subject(s) - graphene , materials science , foil method , chemical vapor deposition , fabrication , layer (electronics) , field effect transistor , silicon , nanotechnology , graphene nanoribbons , optoelectronics , transistor , graphene foam , composite material , electrical engineering , medicine , alternative medicine , engineering , pathology , voltage
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