Resistivity and surface scattering of (0001) single crystal ruthenium thin films | Zendy

Sameer Ezzat | Zendy; Prabhu Doss Mani | Zendy; Asim Khaniya | Zendy; William E. Kaden | Zendy; Daniel Gall | Zendy; K. Barmak | Zendy; Kevin R. Coffey | Zendy

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Resistivity and surface scattering of (0001) single crystal ruthenium thin films

Author(s) -

Sameer Ezzat,

Prabhu Doss Mani,

Asim Khaniya,

William E. Kaden,

Daniel Gall,

K. Barmak,

Kevin R. Coffey

Publication year - 2019

Publication title -

journal of vacuum science and technology. a. vacuum, surfaces, and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.5093494

Subject(s) - electrical resistivity and conductivity , materials science , scattering , thin film , single crystal , annealing (glass) , x ray photoelectron spectroscopy , low energy electron diffraction , electron diffraction , analytical chemistry (journal) , condensed matter physics , composite material , nanotechnology , chemistry , optics , crystallography , chemical engineering , diffraction , chromatography , electrical engineering , engineering , physics

The resistivity size effect in nanoscale metals is of both scientific and technological interest, the latter due to its importance to interconnects between transistors in integrated circuits. In th...

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