Open AccessToward accurate composition analysis of GaN and AlGaN using atom probe tomography
Author(s) -
R. J. H. Morris,
Ramya Cuduvally,
Davit Melkonyan,
Claudia Fleischmann,
Ming Zhao,
L. Arnoldi,
Paul van der Heide,
Wilfried Vandervorst
Publication year - 2018
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.5019693
Subject(s) - atom probe , sublimation (psychology) , stoichiometry , materials science , dissociation (chemistry) , semiconductor , laser , wide bandgap semiconductor , analytical chemistry (journal) , optoelectronics , nanotechnology , optics , chemistry , psychology , physics , chromatography , transmission electron microscopy , psychotherapist
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