Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature | Zendy

Julian Pilz | Zendy; Alberto Perrotta | Zendy; Paul Christian | Zendy; Martin Tazreiter | Zendy; Roland Resel | Zendy; G. Leising | Zendy; Thomas Grießer | Zendy; Anna Maria Coclite | Zendy

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Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Author(s) -

Julian Pilz,

Alberto Perrotta,

Paul Christian,

Martin Tazreiter,

Roland Resel,

G. Leising,

Thomas Grießer,

Anna Maria Coclite

Publication year - 2017

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.5003334

Subject(s) - crystallite , atomic layer deposition , materials science , substrate (aquarium) , zinc , thin film , layer (electronics) , plasma , deposition (geology) , refractive index , band gap , analytical chemistry (journal) , atomic layer epitaxy , texture (cosmology) , chemical engineering , optoelectronics , nanotechnology , chemistry , metallurgy , organic chemistry , artificial intelligence , image (mathematics) , oceanography , computer science , engineering , biology , paleontology , quantum mechanics , physics , sediment , geology

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