Open AccessReview Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
Author(s) -
J. E. Greene
Publication year - 2017
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4998940
Subject(s) - sputtering , high power impulse magnetron sputtering , sputter deposition , cavity magnetron , thin film , optoelectronics , materials science , deposition (geology) , physical vapor deposition , engineering physics , nanotechnology , physics , geology , paleontology , sediment
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