Open AccessRoom temperature atomic layer deposition of TiO2 on gold nanoparticles
Author(s) -
K. Kikuchi,
Masanori Miura,
Kensaku Kanomata,
Bashir Ahmmad,
Shigeru Kubota,
Fumihiko Hirose
Publication year - 2016
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4971398
Subject(s) - atomic layer deposition , nanoparticle , colloidal gold , materials science , deposition (geology) , coating , conformal coating , nanometre , titanium , layer (electronics) , argon , nanotechnology , chemical engineering , analytical chemistry (journal) , composite material , chemistry , metallurgy , chromatography , paleontology , organic chemistry , sediment , engineering , biology
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