Auger electron spectroscopy study of semiconductor surfaces: Effect of cleaning in inert atmosphere | Zendy

Jolien Debehets | Zendy; Sérgio Miranda | Zendy; Pía Homm | Zendy; Michel Houssa | Zendy; Marc Seefeldt | Zendy; JeanPierre Locquet | Zendy; Jin Won Seo | Zendy

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Auger electron spectroscopy study of semiconductor surfaces: Effect of cleaning in inert atmosphere

Author(s) -

Jolien Debehets,

Sérgio Miranda,

Pía Homm,

Michel Houssa,

Marc Seefeldt,

JeanPierre Locquet,

Jin Won Seo

Publication year - 2016

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.4955149

Subject(s) - auger electron spectroscopy , semiconductor , auger , inert gas , electron spectroscopy , analytical chemistry (journal) , characterization (materials science) , spectroscopy , materials science , auger effect , semiconductor device , oxygen , chemistry , optoelectronics , nanotechnology , atomic physics , environmental chemistry , physics , organic chemistry , quantum mechanics , layer (electronics) , nuclear physics , composite material

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