Fabrication of pyramidal probes with various periodic patterns and a single nanopore | Zendy

Seong Soo Choi | Zendy; Myoung Jin Park | Zendy; Chul Hee Han | Zendy; Sae -Joong Oh | Zendy; Sang Hun Han | Zendy; Nam Kyou Park | Zendy; YongSang Kim | Zendy; Hyuck Choo | Zendy

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Fabrication of pyramidal probes with various periodic patterns and a single nanopore

Author(s) -

Seong Soo Choi,

Myoung Jin Park,

Chul Hee Han,

Sae -Joong Oh,

Sang Hun Han,

Nam Kyou Park,

YongSang Kim,

Hyuck Choo

Publication year - 2015

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.4935560

Subject(s) - pyramid (geometry) , materials science , groove (engineering) , nanopore , optics , tungsten , focused ion beam , fabrication , aperture (computer memory) , apex (geometry) , electron beam lithography , beam (structure) , transmission electron microscopy , optoelectronics , nanotechnology , resist , ion , physics , geometry , medicine , alternative medicine , mathematics , pathology , quantum mechanics , layer (electronics) , acoustics , metallurgy

The nanometer-scale patterned pyramidal probe with an electron beam-induced nanopore on the pyramid apex is an excellent candidate for an optical biosensor. The nanoapertures surrounded with various periodic groove patterns on the pyramid sides were fabricated using a focused ion beam technique, where the optical characteristics of the fabricated apertures with rectangular, circular, and elliptical groove patterns were investigated. The elliptical groove patterns on the pyramid were designed to maintain an identical distance between the grooves and the apex for the surface waves and, among the three patterns, the authors observed the highest optical transmission from the elliptically patterned pyramidal probe. A 103-fold increase of the transmitted optical intensity was observed after patterning with elliptical grooves, even without an aperture on the pyramid apex. The nanopore on the apex of the pyramid was fabricated using electron beam irradiation and was optically characterized.

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