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Effect of GaN surface treatment on Al2O3/n-GaN MOS capacitors
Author(s) -
T. Hossain,
Daming Wei,
James H. Edgar,
N. Y. Garces,
Neeraj Nepal,
Jennifer K. Hite,
Michael A. Mastro,
Charles R. Eddy,
Harry M. Meyer
Publication year - 2015
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4931793
Subject(s) - materials science , capacitor , surface roughness , x ray photoelectron spectroscopy , capacitance , optoelectronics , wide bandgap semiconductor , analytical chemistry (journal) , hysteresis , oxide , voltage , composite material , electrode , condensed matter physics , electrical engineering , chemical engineering , metallurgy , chemistry , physics , chromatography , engineering

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