Open AccessTiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
Author(s) -
Ehsan Hashemi,
Jörgen Bengtsson,
Johan Gustavsson,
Stefan Carlsson,
Georg Rossbach,
Åsa Haglund
Publication year - 2015
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.4929416
Subject(s) - materials science , grating , optics , optoelectronics , wavelength , polarization (electrochemistry) , high contrast , reflectivity , etching (microfabrication) , layer (electronics) , nanotechnology , chemistry , physics
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