Open AccessEnhancement of Raman signals from low-k dielectrics with angle-resolved light scattering on nanostructure patterned Cu/low-k interconnects of IC devices
Author(s) -
Maggie Yamin Huang,
Бо Лю,
Pik Kee Tan,
Jeffrey Lam,
Zhihong Mai
Publication year - 2015
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.4905939
Subject(s) - materials science , raman spectroscopy , raman scattering , nanostructure , optoelectronics , dielectric , substrate (aquarium) , nanometre , semiconductor , optics , nanotechnology , oceanography , physics , geology , composite material
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