Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures | Zendy

D. Stöffler | Zendy; R. Hoffmann | Zendy

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Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures

Author(s) -

D. Stöffler,

R. Hoffmann

Publication year - 2014

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.4905092

Subject(s) - fabrication , nanostructure , tripod (photography) , materials science , nanotechnology , electrical contacts , nanolithography , ultra high vacuum , vacuum chamber , optoelectronics , optics , physics , composite material , medicine , alternative medicine , pathology

The authors present the design of a modular sample holder that offers the possibility of in situ fabrication of metallic nanostructures under ultrahigh vacuum. One of the crucial points is to bridge the gap between the macroscopic leads and the nanostructure itself. This problem is solved by using a set of two different masks. For a precise alignment of the two masks, a magnetic tripod connection system has been developed. With this new system, an alignment precision of 26 μm is obtained. As a result of the fabrication in ultrahigh vacuum, the nanostructures will be accessible to scanning probe techniques without surface contamination. First results show that electrical measurements are indeed possible.

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