Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps | Zendy

Manasa Medikonda | Zendy; Gangadhara Raja Muthinti | Zendy; Jody Fronheiser | Zendy; Vimal Kamineni | Zendy; Matthew Wormington | Zendy; Kevin Matney | Zendy; Thomas Adam | Zendy; Evguenia Karapetrova | Zendy; Alain C. Diebold | Zendy

Open Access

Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps

Author(s) -

Manasa Medikonda,

Gangadhara Raja Muthinti,

Jody Fronheiser,

Vimal Kamineni,

Matthew Wormington,

Kevin Matney,

Thomas Adam,

Evguenia Karapetrova,

Alain C. Diebold

Publication year - 2014

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/1.4863316

Subject(s) - reciprocal lattice , materials science , silicon , diffraction , fin , optics , optoelectronics , physics , composite material

College of Nanoscale Science and Engineering, SUNY, New York 12203 GLOBALFOUNDRIES, Albany, New York 12203 Jordan Valley Semiconductors Inc., 3913 Todd Lane, Suite 106, Austin, Texas 78744 Advanced Photon Source, Argonne National Laboratory, 9700S Cass Ave., Argonne, Illinois 60439

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