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Conformally coating vertically aligned carbon nanotube arrays using thermal decomposition of iron pentacarbonyl
Author(s) -
Owen Hildreth,
Baratunde A. Cola,
Samuel Graham,
C.P. Wong
Publication year - 2012
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.3692724
Subject(s) - iron pentacarbonyl , materials science , chemical vapor deposition , coating , carbon nanotube , conformal coating , evaporation , thermal decomposition , deposition (geology) , electron beam physical vapor deposition , chemical engineering , nanotechnology , composite material , inorganic chemistry , chemistry , paleontology , physics , organic chemistry , sediment , biology , engineering , thermodynamics

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