Open AccessUltrahigh luminescence extraction via the monolithic integration of a light emitting active region with a semiconductor hemisphere
Author(s) -
S.N. Wu,
Shui-Qing Yu,
D. Ding,
S. R. Johnson,
Y.–H. Zhang
Publication year - 2011
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.3592190
Subject(s) - optoelectronics , materials science , fabrication , photoresist , diode , light emitting diode , etching (microfabrication) , dry etching , semiconductor , quantum efficiency , nanotechnology , medicine , alternative medicine , layer (electronics) , pathology
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