Open AccessQuantitative dopant profiling of p-n junction in InGaAs∕AlGaAs light-emitting diode using off-axis electron holography
Author(s) -
Suk Jae Chung,
S. R. Johnson,
Ding Ding,
YongHang Zhang,
David J. Smith,
Martha R. McCartney
Publication year - 2010
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/1.3244575
Subject(s) - electron holography , dopant , materials science , optoelectronics , diode , doping , quantum efficiency , electron , impurity , light emitting diode , holography , optics , chemistry , physics , organic chemistry , quantum mechanics
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