Beam induced deposition of platinum using a helium ion microscope | Zendy

Colin A. Sanford | Zendy; Lewis Stern | Zendy; Louise Barriss | Zendy; L. Farkas | Zendy; Mark DiManna | Zendy; Russ Mello | Zendy; Diederik Maas | Zendy; Paul F. A. Alkemade | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Beam induced deposition of platinum using a helium ion microscope

Author(s) -

Colin A. Sanford,

Lewis Stern,

Louise Barriss,

L. Farkas,

Mark DiManna,

Russ Mello,

Diederik Maas,

Paul F. A. Alkemade

Publication year - 2009

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.3237095

Subject(s) - field ion microscope , helium , ion beam , microscope , electron beam induced deposition , focused ion beam , deposition (geology) , materials science , nanolithography , platinum , gallium , ion beam deposition , nanotechnology , beam (structure) , ion , analytical chemistry (journal) , optoelectronics , chemistry , optics , metallurgy , transmission electron microscopy , physics , fabrication , organic chemistry , alternative medicine , scanning transmission electron microscopy , pathology , biology , paleontology , catalysis , medicine , sediment

Helium ion microscopy is now a demonstrated practical technology that possesses the resolution and beam currents necessary to perform nanofabrication tasks, such as circuit edit applications. Due to helium’s electrical properties and sample interaction characteristics relative to gallium, it is likely that the properties and deposition characteristics of beam induced deposited films will be different than those produced using gallium focused ion beam technology. However, there is at this date very little literature discussing the use of helium beams for beam induced chemistry or characterization of the resulting films. In this article, the authors present initial results regarding the deposition of platinum using a helium ion microscope and a gaseous organometallic precursor. Within this work a Carl Zeiss ORION\u99 helium ion microscope was used along with an OmniGIS unit to deposit platinum while exploring a variety of controllable parameters such as beam current, beam overlap, and size of deposition.QN/Quantum NanoscienceApplied Science

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research