Open AccessFabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system
Author(s) -
ShihChe Hung,
ShuChia Shiu,
Cha-Hsin Chao,
ChingFuh Lin
Publication year - 2009
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.3137963
Subject(s) - materials science , spheres , excimer laser , rod , silicon , fabrication , laser , optics , nanotechnology , optoelectronics , medicine , physics , alternative medicine , pathology , astronomy
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