Emission and focusing characteristics of volcano-structured double-gated field emitter arrays | Zendy

Yoichiro Neo | Zendy; Masafumi Takeda | Zendy; Takashi Soda | Zendy; Masayoshi Nagao | Zendy; T. Yoshida | Zendy; S. Kanemaru | Zendy; Toshikatsu Sakai | Zendy; Kei Hagiwara | Zendy; Nobuo Saito | Zendy; Toru Aoki | Zendy; Hidenori Mimura | Zendy

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Emission and focusing characteristics of volcano-structured double-gated field emitter arrays

Author(s) -

Yoichiro Neo,

Masafumi Takeda,

Takashi Soda,

Masayoshi Nagao,

T. Yoshida,

S. Kanemaru,

Toshikatsu Sakai,

Kei Hagiwara,

Nobuo Saito,

Toru Aoki,

Hidenori Mimura

Publication year - 2009

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.3093891

Subject(s) - common emitter , electrode , anode , field electron emission , materials science , electric field , current (fluid) , electron , optoelectronics , cathode , field (mathematics) , optics , physics , electrical engineering , engineering , nuclear physics , quantum mechanics , thermodynamics , mathematics , pure mathematics

Volcano-structured double-gated field emitter arrays (VDG-FEAs) with different focusing electrode height have been fabricated and the focusing characteristics for each VDG-FEAs were evaluated in detail. The authors experimentally proved that lowering the focusing electrode was very effective to keep a high emission current and successfully removed the electric field relaxation at the tip during the focusing operation. The anode current of about 1.9μA was maintained for the VDG-FEA with the height of the focusing electrode relative to the extraction electrode, hf=−470nm, even in applying 5V to the focusing electrode, and the current was 84.4 times larger, compared with the sample with hf=220nm under the same focusing condition. It was found that the emitted electrons returned back to the extraction electrode by the potential barrier caused by the low focusing potential below 3V in every sample.

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