Critical parameter determination of sonic flow controller diamond microtubes and micronozzles | Zendy

S. S. Mammana | Zendy; Francisco Tadeu Degasperi | Zendy; M. C. Salvadori | Zendy; D. C. Sparapani | Zendy; M. F. Laino | Zendy; Ricardo C. Rangel | Zendy; F. S. Teixeira | Zendy; M. Cattani | Zendy

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Critical parameter determination of sonic flow controller diamond microtubes and micronozzles

Author(s) -

S. S. Mammana,

Francisco Tadeu Degasperi,

M. C. Salvadori,

D. C. Sparapani,

M. F. Laino,

Ricardo C. Rangel,

F. S. Teixeira,

M. Cattani

Publication year - 2007

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.2790924

Subject(s) - diamond , materials science , flow (mathematics) , throughput , volume (thermodynamics) , constant (computer programming) , volumetric flow rate , work (physics) , mechanics , mass flow , choking , controller (irrigation) , acoustics , mechanical engineering , composite material , thermodynamics , computer science , engineering , physics , telecommunications , anatomy , wireless , agronomy , biology , programming language , medicine

In this article, the authors measure throughput of sonic diamond microtubes and micronozzles that can work as passive gas flow controllers and flow meters under choking conditions. The behavior of the outlet pressure through the microdevices using an experimental setup with constant volume and constant temperature was determined in order to obtain the critical throughput, the critical mass flow rate, and the discharge coefficients of the diamond sonic microdevices.

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