Open AccessDirect imprinting using soft mold and gas pressure for large area and curved surfaces
Author(s) -
Jer-Haur Chang,
Fang-Sung Cheng,
Chi-Chung Chao,
Yung-Chun Weng,
SenYeu Yang,
Lon A. Wang
Publication year - 2005
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.2073447
Subject(s) - mold , imprinting (psychology) , resist , materials science , composite material , nitrogen gas , nanotechnology , substrate (aquarium) , nitrogen , chemistry , geology , biochemistry , oceanography , organic chemistry , layer (electronics) , gene
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