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Hydrogen etching mechanism in nitrogen implanted iron alloys studied with in situ photoemission electron spectroscopy
Author(s) -
Carlos A. Figueroa,
F. Alvarez
Publication year - 2005
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/1.2013322
Subject(s) - x ray photoelectron spectroscopy , hydrogen , analytical chemistry (journal) , nitrogen , etching (microfabrication) , photoemission spectroscopy , oxygen , materials science , desorption , nitride , chemistry , inorganic chemistry , chemical engineering , nanotechnology , adsorption , layer (electronics) , organic chemistry , chromatography , engineering
In situ photoemission electron spectroscopy (XPS) is used to elucidate the hydrogen etching mechanism in nitrogen implanted iron alloys. The samples were prepared by bombarding stainless steel with a broad nitrogen ion source in a high vacuum chamber. The photoemission spectra evolution on increasing hydrogen ion current is correlated with the nitrided surface properties. The presence of hydrogen is associated with oxygen removal, augmenting the surface nitrogen concentration. The total active sites at the surface are constant, i.e., oxygen competes with nitrogen sites on the surface. The absorbed oxygen is etched following a linear law on hydrogen ion flux. Simultaneously, the formation of metallic nitrides is enhanced. At the working temperature, the efficiency of the process is determined by a characteristic time that depends on hydrogen retention time, water formation and desorption time. (c) 2005 American Vacuum Society

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