Open AccessNanoimprint process using epoxy-siloxane low-viscosity prepolymer
Author(s) -
B. Viallet,
P. Gallo,
E. Daran
Publication year - 2004
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.1835319
Subject(s) - materials science , epoxy , nanoimprint lithography , reactive ion etching , embossing , composite material , prepolymer , viscosity , layer (electronics) , polymer , etching (microfabrication) , fabrication , polyurethane , medicine , alternative medicine , pathology
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