Two-photon absorption laser induced fluorescence on O and O3 in a dc plasma for oxidation of aluminum | Zendy

K. Knechten | Zendy; B. Kniknie | Zendy; R. Engeln | Zendy; H. J. M. Swagten | Zendy; B. Koopmans | Zendy; M. C. M. van de Sanden | Zendy; W. J. M. de Jonge | Zendy

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Two-photon absorption laser induced fluorescence on O and O3 in a dc plasma for oxidation of aluminum

Author(s) -

K. Knechten,

B. Kniknie,

R. Engeln,

H. J. M. Swagten,

B. Koopmans,

M. C. M. van de Sanden,

W. J. M. de Jonge

Publication year - 2004

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/1.1807837

Subject(s) - ozone , absorption (acoustics) , plasma , aluminium , oxygen , analytical chemistry (journal) , laser , fluorescence , laser induced fluorescence , photochemistry , materials science , chemistry , two photon absorption , optics , environmental chemistry , physics , organic chemistry , quantum mechanics , metallurgy , composite material

It has been conjectured that atomic oxygen and ozone can have a great influence on the plasma oxidation of ultrathin aluminum for magnetic tunnel junctions. In order to measure the density of O and ozone, two-photon absorption laser induced fluorescence measurements are performed in the dc glow plasma that is used for the oxidation process. It was found that ozone is much more abundantly present compared to atomic oxygen. Using in situ, real-time ellipsometry measurements, we prove that ozone is not directly involved in the oxidation process.

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