Multivariable control of multizone chemical mechanical polishing | Zendy

Sheng-Jyh Shiu | Zendy; ChengChing Yu | Zendy; ShihHaur Shen | Zendy

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Multivariable control of multizone chemical mechanical polishing

Author(s) -

Sheng-Jyh Shiu,

ChengChing Yu,

ShihHaur Shen

Publication year - 2004

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - Uncategorized

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.1761483

Subject(s) - multivariable calculus , control theory (sociology) , singular value decomposition , polishing , controller (irrigation) , position (finance) , process control , control variable , pid controller , design matrix , wafer , mathematics , process (computing) , linear regression , computer science , engineering , control engineering , temperature control , algorithm , control (management) , statistics , mechanical engineering , agronomy , electrical engineering , finance , artificial intelligence , economics , biology , operating system

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